LCD color filter process

We introduce our system and process of LCD( Liquid Crystal Display) by movies and figures. Through this contents, You can see that our equipment supports process of CF(Color Filter), or structure of CF, and about lithography, and inspection technologies.

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Our technologies supporting Color Filter process

: V-Technology's System contribute to Color Filter process.

Glass substrate entry and cleaning Photo resist coating AEGIS series 現像

【Process01】

Glass substrate entry and cleaning

 

Movie of this process

 

【Process02】

Photo resist coating

Movie of this process

 

【Process03】

Exposure

Details of this system

Movie of this process

 

【Process04】

Pattern forming

Movie of this process

           
RGB forming Capricorn series Jupiter series Mercury series

【Process05】

RGB forming

Process1 ~ 4 are repeated as each R, G, B process after BM process.

Movie of this process

 

【Process06】

Inspection

CF substrates are inspected as necessary in Process1~5.

Details of this system

Movie of this process

 

【Process07】

Repair

CF substrates are repaired as necessary after Inspection.

Details of this system

Movie of this process

 

【Process08】

Measurement

CF substrates are measured as necessary in Process1~5.

Details of this system

Movie of this process

       
AsteroidII series ITO forming Photo Spacer (PS) forming Final inspection(Next Cell process)

【Process09】

Visual inspection

CF substrates are inspected by inspectors as necessary in Process1~5.

Details of this system

Movie of this process

 

【Process10】

ITO forming

Movie of this process

 

【Process11】

Photo Spacer (PS) forming

Movie of this process

 

【Process12】

Final inspection

CF substrates are final inspected as final inspection in Process10~11 and shipped to next process.

Movie of this process

         

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What’s Color Filter?

CF creates colors of image on LCD.
This filter is composed thin glass substrate and color resist.
4 color resists(R,G,B,BM) patterns are formed on glass substrate. R, G, B patterns are formed into grid or stripe by BM(Black Matrix).

Color Filter

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What's Lithography?

- Copies of photos taken by camera, compared with Photolithography process of LCD -
The way of making a fine pattern on CF (Color filter) closes to the way of making copies of photo taken by camera. First of all, entry and clean glass substrate (process01), coat photo resist (proccess02), expose and develop pattern (process03, 04).

Printing photo copies Photolithography of Color Filter
Pattern on negative film is transferred to photographic paper Pattern on negative film is transferred to photographic paper. Exposure(AEGIS) Master pattern on photo mask is transferred to glass substrate by Exposure.
↓   ↓  
Pattern forming Photo paper is developed and dried. Pattern forming Exposed substrate has a development and heat process after exposure process.
↓   ↓  
Printing completed Printing completed. CF completed. CF completed.

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What's Inspection, Measurement, Repair technologies on process of LCD?

It's possibly that there are some defects on CF substrate, for example, lack of color, a pattern defect, pattern size difference, and so on. Inspection, measurement and repair system are needed to CF process to improve productivity and manage quality.

Inspection   Repair   Total Pitch measurement   Visual Inspection
Inspection   Repair   Total Pitch measurement   Visual Inspection

Micrometer size defects can be detected by this inspection system with unique CCD cameras and microscopes.

Movie of this process

 

Micrometer size defects can be repaired by repair system.
This system contributes to better production yield.

Movie of this process

  3m length can be measured with 0.01micrometer accuracy by this system.

*1micrometer= 1/1000mm

Movie of this process

 

Large size defects, such as mura, uniformity, can be detected by visual inspection. This system support inspector to detect these defects efficiently.

Movie of this process

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