Inspection, Repair, Measurement and Macro examination
for FPD industry

FPD inspection system 'Capricorn series'   FPD repair system 'Jupiter series'
     
FPD inspection system 'Capricorn series' This system detects various defects that occur in each FPD* manufacturing process and serves to quality control of mass production.   FPD repair system 'Jupiter series' This system repairs various defects that occur on substrates in the FPD manufacturing process.
     
FPD total pitch measurement system 'Mercury series'   FPD macro review system 'Asteroid II series'
     
FPD total pitch measurement system 'Mercury series' This system measures total pitch (distance between two points) and controls dimension accuracy and its variation for each substrate.   FPD macro review system for FPD 'Asteroid II series'

This system supports visual inspection to confirm surface quality of each substrate.

     
FPD critical dimension measurement system 'Venus series'    
     
FPD critical dimension measurement system 'Venus series'

This system measures fine dimensions of various thin film patterns on the FPD, especially line width, aperture size and dimension between layers, at high speed and with high accuracy.

   
     

*FPD...Flat Panel Display